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Wetting Behaviour of Glasses on Nanostructured Silicon Surfaces



Author(s)

Sebastian Gropp, Michael Fischer, Lars Dittrich, Beate Capraro, Jens Müller and Martin Hoffmann

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DOI:10.17265/2328-2223/2015.01.002

The behavior of molten glass on nanostructured silicon surface is of essential importance for the fabrication of a strong bond interface between glass (or glass-based ceramic tapes) and silicon. It was found that typical glasses do not wet the silicon surface that is always coated with a thin silica layer. It is shown that the high surface tension of molten glasses at high temperatures in combination with the dewetting surface of the structured silicon prohibits the formation of an interlocking bond between the two substrates. The theory of wetting can be applied to molten glasses, too. As a consequence, a similar solution as for liquids is investigated: the surface has to be chemically modified to become wettable. Investigations with sputtered metals on the nanostructured silicon improve wetting of the surface and result in a better bond homogeneity of the SiCer compound during sintering with low pressure.

SiCer, silicon-on-ceramics, LTCC, wetting behaviour, pressure-assisted sintering process.