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This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License
Article
Study of Plasma and Ion Beam Sputtering Processes
Author(s)
M.M.Abdelrahman
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DOI:10.17265/2159-5348/2015.02.007
Affiliation(s)
Accelerators and Ion Sources Department, Nuclear Research Center, Atomic Energy Authority, 13759 Inchas, Atomic Energy, Cairo,Egypt
ABSTRACT
The effects of plasma (ions, electrons) and other energetic particles are now widely used for substrate cleaning as well as to assist and control thin film growth and various applications. In this work, historical review of the plasma and its various types are given and described. Different types of gas discharge and plasma production are also discussed in detail. Furthermore, technique of ion beam extraction from a plasma source for sputtering process by using a suitable electrode is carefully studied and given. In further consequence, a general review about the physics and mechanism of sputtering processes is studied. Different types of sputtering techniques are investigated and clarified. Theoretical treatment for determination of sputtering yield for low and high atomic species elements as a function of energy from 100 to 5,000 eV are studied and discussed. Finally, various applications of plasma-and-ion beam sputtering will also be mentioned and discussed.
KEYWORDS
Plasma, ion sputtering, gas mixing, electron injection.
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