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This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License
Article
XRD and XPS Analysis of TiO2 Thin Films Annealed in Different Environments
Author(s)
Tamara Potlog1, Petru Dumitriu1, Marius Dobromir2 and Dumitru Luca2
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DOI:10.17265/2161-6221/2014.06.004
Affiliation(s)
1. Department of Physics and Engineering, Moldova State University, MD 2009, Chisinau Moldova 2. Faculty of Physics, Alexandru Ioan Cuza University, Iasi 700506, Romania
ABSTRACT
Undoped and Nb-doped TiO2 thin films have been fabricated on glass substrate by RF magnetron sputtering. The morphologic, structural and surface composition of these films before and after annealing in different environments were investigated by atomic force microscopy (AFM) imaging, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The XRD data reveal that the crystallinity is improved when the films are Nb-doped and annealed in H2 environment. The TiO2 thin films annealed in H2 environment exhibit only the anatase phase. The XPS analysis of TiO2 with Nb indicates the maximum shift in binding energy of the Ti 2p peak. A mechanism for the incorporation of Nb in the TiO2 lattice has been proposed.
KEYWORDS
TiO2 thin films, doping effect, H2 annealing, XRD, XPS analysis.
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